About SEMI EHS Guidelines for Semiconductor/FPD manufacturing equipment

SEMI Standards are industry-specific guidelines for manufacturing equipment. Use of SEMI Standards can decrease manufacturing costs increase (RAM), Reliability, Availabity & Maintainability and productivity, and access barrier free markets. In addition, standards increase industry efficiency by reducing/eliminating duplication of efforts, inter-operability and achieving better EHS at lower design & manufacturing costs. These guidelines have been created and periodically updated by industry working groups consisting of device maker, equipment manufacturer, material maker, facility maker, third-party, university and laboratory.
SEMI S2 and SEMI S26 are representatives of environmental health and safety (EHS) guidelines for manufacturing equipment system in semiconductor and FPD (Flat Panel Display) industry.
For almost every major semiconductor and FPD manufacturing company in North America, EU, South Korea, China and Taiwan, usually describes equipment safety as a necessary condition in the equipment purchase specifications that equipment must meet the applicable standards, SEMI S2 or SEMI S26.

Basic guidelines for equipment safety design

SEMI S2-0818
Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment(SME)

Purpose

This Safety Guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment (SME).

SEMI S26-0516
Environmental, Health, and Safety Guideline for FPD Manufacturing System

Purpose

This Safety Guideline is intended as a set of performance-based environmental, health and safety (EHS) considerations for FPD manufacturing system (FPDMS) used to manufacture, measure, assemble, and test FPD products including their subsystems. In addition, Subsystems of FPDMS that meet the provisions of SEMI S2 may continue to SEMI S2.

SEMI S8-0218
Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment(SME)

Purpose

This safety guideline is intended to promote compatibility between the user and the equipment, and to provide ergonomics design principles and considerations for semiconductor manufacturing equipment. This safety guideline is also intended to stipulate Supplier Ergonomic Success Criteria (SESC) for ergonomics design and equipment evaluation. To minimize potential for errors and mishaps, by conforming to users expectations.

SEMI S14-1016
Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

Purpose

This guideline is intended to provides considerations that will assist to identify, assessing and mitigating the risk to equipment and product associated with fire and combustion by-products.

SEMI S17-0113
Safety Guideline for Unmanned Transport Vehicle (UTV) Systems

Purpose

This Safety Guideline is intended as a set of environment, health and safety (EHS) considerations for unmanned transport vehicle (UTV) system, which is used to automate the movement of material (i.e. FOUP, glass substrate cassette) within semiconductor or flat panel display (FPD) factories or laboratories. UTV system includes both floor traveling vehicle (FTV) system and overhead traveling vehicle (OTV) system.

SEMI S22-0718
Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

Purpose

This guideline is intended to provide a set of design based electrical safety considerations for production equipment used in the semiconductor industry and also stipulate about safety verification test.

FLOW CHART for Achieving Integrated Optimal DesignEMI S2/SEMI S26 Evaluation

Guidelines to assist equipment safety design

SEMI S1-1015
Safety Guideline for Equipment Safety Labels

Purpose

This guideline provides the content and format of equipment safety labels that alert persons to hazards associated with the equipment and also assists to create unified international semiconductor-industry-specific safety labeling format for equipment.

SEMI S10-0815
Safety Guideline for Risk Assessment and Risk Evaluation Process

Purpose

This guideline is intended to establish general principles for risk assessment to enable identification of hazards, risk estimation and risk evaluation in a consistent and practical manner. Use of this safety guideline is intended to clarify a level of risk and assist risk assessments on equipment in the semiconductor and similar industries and help development of unified measures to control residual risk(s) acceptable to user industry.

SEMI S3-1211
Safety Guideline for Process Liquid Heating Systems

Purpose

This Safety Guideline is intended to provide minimum general safety considerations for the design and documentation of heating systems used for changing or maintaining the temperatures of process liquids used in semiconductor and flat panel display manufacturing and provides several means of achieving a level of Risk no greater than Low (as defined by SEMI S10 and SEMI S14) for process liquid heating systems (PLHS).

SEMI S6-0618
EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

Purpose

This safety guideline provides safety performance criteria for exhaust ventilation of semiconductor manufacturing equipment (SME) and test methods for assessing conformance to those criteria. This guideline also refers test Method for enclosures using SF6 tracer gas and gas chromatography.

PAGETOP